Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target: Journal of Vacuum Science & Technology A: Vol 36, No 6
Sputtering Sources
Tutorial: Hysteresis during the reactive magnetron sputtering process: Journal of Applied Physics: Vol 124, No 24
Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system - ScienceDirect